This article explores the difference between a stage on granite base and integrated granite motion systems
Sponsored by PI LPFeb 27 2024Reviewed by Andrea Salazar For manufacturers dealing with high precision, granite-based, multi-axis motion systems, two primary choices exist.
A 3-axis wide base rails on granite XY-theta stage with bellows for protection on the lower linear axis and seal strips on the upper linear axis. Image Credit: PI LPThe precision motion systems depicted above consist of multiple stages for versatile motion. The 4-axis system on the left is tailored for substrate and wafer inspection and integrates mechanical rails directly onto the granite base.
A 3-axis XY-Theta stage based on a gantry-type planar air-bearing XY-table carrying an air-bearing rotary table. The linear motor magnet tracks are mounted on the granite base, but due to the air-bearing principle, there is no contact at all. Frictionless planar XY motion is possible with magnetic bearings, air bearings, and flexures and provides better geometric performance than stacked XY stages.
In split-bridge or gantry multi-axis positioning systems, the Z-axis is commonly mounted either directly on the bridge, the bridge-mounted X-axis, or the gantry cross-axis. The Effect of Reduced Center of Gravity on Abbe Errors, Stiffness, and Lifetime Removing the base plate from the individual stages lowers the working height and reduces Abbe errors. This positively affects the performance of work point positioning across multiple degrees of freedom.
When using mechanical bearings, the rail-on-granite design accommodates larger bearings without increasing the vertical height or center of gravity of the moving platform , thanks to the removal of the machined metal base. Environmental Considerations, Protection From Debris – Laser Processing Various high-performance linear stages, such as the V-417 linear motor stage, already feature side seals, hardcovers, and air purging for debris ingress protection . This is crucial, particularly in safeguarding bearings and encoders during laser processing or within industrial settings with debris-generating processes.
External events, such as a severe crash involving other application-related components , may necessitate servicing or replacing a stage. Cost Comparison of Integrated Granite Motion Systems vs Stage-on-Granite Motion Systems Here, differences in cost primarily hinge on the level of customization and the number of identical systems needed by a customer.
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